Ultra-precision electromechanical systems to further improve the accuracy fast motion

Ultra-precision micro-displacement piezoelectric drive platform as a variety of modern microelectronics manufacturing equipment, a core component of its R & D directly affect the level of national electronic information industry's technological progress. However, the inherent piezoelectric actuator hysteresis characteristics, causes a serious decline in system accuracy, and even lead to instability of the closed-loop system. Therefore, in order to further improve the ultra-precision  Electric energy meter  precision electromechanical systems, nano-processing and operations to meet the requirements of the urgent need to study hysteresis compensation control theory and method. This paper studies the piezoelectric  Voltage stabilizer  compensation fuzzy control method, the design of two-dimensional parallel micro-moving platform, using a multi-input single-output fuzzy system for piezoelectric  power transformers  characteristics of modeling, real-time simulation system is constructed, on this basis, to achieve a hysteresis compensation fuzzy control experiments to determine the equivalent. First, the use of composite double parallel bar type flexure hinge mechanism, designed with a very low degree of coupling of the two-dimensional motion parallel micro-moving platform, its structural optimization calculations and finite element analysis using EDM wire cutting is completed, to achieve the relevant testing and experiments.